Tuesday, October 2, 2007
4:00PM - 4:30PM
|
ET2.00001: Plasma-Based Low Energy Ion Implantation
Invited Speaker:
Ludovic Godet
Preview Abstract |
Tuesday, October 2, 2007
4:30PM - 4:45PM
|
ET2.00002: Theory and particle-in-cell simulation of ion-ion plasmas
Gary Leray
, Albert Meige
, Jean-Luc Raimbault
, Pascal Chabert
Preview Abstract |
Tuesday, October 2, 2007
4:45PM - 5:00PM
|
ET2.00003: Propagating double layers in electronegative plasmas
Albert Meige
, Nicolas Plihon
, Gerjan Hagelaar
, Jean-Pierre Boeuf
, Pascal Chabert
, Rod Boswell
Preview Abstract |
Tuesday, October 2, 2007
5:00PM - 5:15PM
|
ET2.00004: Very High Frequency Capacitively Coupled Plasmas of Electronegative Gases
Shahid Rauf
, Kallol Bera
, Alex Paterson
, Ken Collins
Preview Abstract |
Tuesday, October 2, 2007
5:15PM - 5:30PM
|
ET2.00005: Fast silicon etching by plasma-sheath-lens focused negative ions
Eugen Stamate
Preview Abstract |
Tuesday, October 2, 2007
5:30PM - 5:45PM
|
ET2.00006: Plasma Characterization of Electronegatively diluted VHF CCP Plasmas
Alex Paterson
, Ned Hammond
, Shahid Rauf
, Ed Barnat
, Paul Miller
, Greg Hebner
Preview Abstract |
Tuesday, October 2, 2007
5:45PM - 6:00PM
|
ET2.00007: Formation of ion flux in low frequency and low pressure ccrf discharge
I.V. Schweigert
Preview Abstract |