Tuesday, October 2, 2007
4:00PM - 4:15PM
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ET1.00001: Student Excellence Award Finalist: Surface recombination study in near real time in Cl$_{2}$ plasmas
Joydeep Guha
, Vincent M. Donnelly
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Tuesday, October 2, 2007
4:15PM - 4:30PM
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ET1.00002: Analysis of plasma-surface interactions during plasma etching by in-situ diagnostics of reactants and reaction products
Yoshinori Ueda
, Masahiro Yoshida
, Koji Eriguchi
, Kouichi Ono
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Tuesday, October 2, 2007
4:30PM - 4:45PM
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ET1.00003: Experimental study and modeling of plasma-polymer interactions
Anatoly Napartovich
, Yuri Akishev
, Mikhail Grushin
, Nikolay Dyatko
, Igor Kochetov
, Nikolay Trushkin
, Tran Duc
, Francoise Sommer
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Tuesday, October 2, 2007
4:45PM - 5:00PM
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ET1.00004: Hydrogen plasma interaction with graphite surface
Gilles Cartry
, Cedric Thomas
, Jean-Marc Layet
, Thierry Angot
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Tuesday, October 2, 2007
5:00PM - 5:30PM
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ET1.00005: Plasma-Surface Interactions With Advanced Polymers For Nanoscale Patterning Of Materials
Invited Speaker:
Gottlieb Oehrlein
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Tuesday, October 2, 2007
5:30PM - 5:45PM
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ET1.00006: Comparison of gas-phase chemistry during deposition of amorphous carbon films using capacitive and inductive discharges.
S. Ramachandran
, L. Overzet
, W. Hu
, L.S.N. Tao
, G.-S. Lee
, C. Nelson
, M. Goeckner
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