Thursday, October 4, 2007
10:00AM - 10:15AM
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QR1.00001: Two-dimensional Collisionless Weakly-ionized Plasma in Fluid Approximation
Valery Godyak
, Natalia Sternberg
Preview Abstract |
Thursday, October 4, 2007
10:15AM - 10:30AM
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QR1.00002: Capacitive Discharges Driven by Combined DC/RF Sources
M.A. Lieberman
, Emi Kawamura
, A.J. Lichtenberg
, E.A. Hudson
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Thursday, October 4, 2007
10:30AM - 10:45AM
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QR1.00003: RF discharge under the influence of a magnetic field
Ed Barnat
, Paul Miller
, Alex Paterson
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Thursday, October 4, 2007
10:45AM - 11:00AM
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QR1.00004: The effect of radio-frequency bias on electron density in an inductively coupled plasma reactor, measured by a wave cutoff probe
Mark Sobolewski
, Jung-Hyung Kim
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Thursday, October 4, 2007
11:00AM - 11:15AM
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QR1.00005: Seasoning of Plasma Reactors: Feedback Control Strategies to Counter Wafer-to-Wafer Drifts
Ankur Agarwal
, Mark J. Kushner
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Thursday, October 4, 2007
11:15AM - 11:30AM
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QR1.00006: Diagnostics of continuous electron beam-generated plasma for material processing
Evgeniya Lock
, Scott Walton
, Richard Fernsler
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Thursday, October 4, 2007
11:30AM - 11:45AM
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QR1.00007: Student Excellence Award Finalist: Double layers at anode spots in low-pressure plasma
Scott Baalrud
, Noah Hershkowitz
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Thursday, October 4, 2007
11:45AM - 12:00PM
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QR1.00008: Study of discharge characteristics on transition from metallic to reactive mode in radio frequency magnetron plasma
Joyanti Chutia
, Hemen Kakati
, Arup Ratan Pal
, Heremba Bailung
Preview Abstract |