Session RR1: Material Processing in Low Pressure Plasmas

Chair: Jean-Paul Booth, Ecole Polytechnic
Holiday Inn - Salon CD

Thursday, October 12, 2006
1:30PM - 2:00PM

 RR1.00001: The Role of Plasma Science in Materials Processing
Invited Speaker: Michael Barnes

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Thursday, October 12, 2006
2:00PM - 2:15PM

 RR1.00002: Spatial and temporal structure of a sheath formed in a 300 mm, dual-frequency capacitive argon discharge
Ed Barnat , Paul Miller , Greg Hebner , Alex Paterson , John Holland

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Thursday, October 12, 2006
2:15PM - 2:30PM

 RR1.00003: Study of Nano-Contact Etching Characteristics Using C6F6 Gas.
Jong-Woo Sun , Sung-Chan Park , Chul Ho Shin , Chang Jin Kang , Han Ku Cho , Joo Tae Moon

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Thursday, October 12, 2006
2:30PM - 2:45PM

 RR1.00004: Etching of high-$k$ HfO$_{2}$ films in high-density chlorine-containing plasmas without rf biasing
Kouichi Ono , Keisuke Nakamura , Daisuke Hamada , Kazushi Osari , Koji Eriguchi

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Thursday, October 12, 2006
2:45PM - 3:00PM

 RR1.00005: Study on the characteristics of etching organic hard mask for patterning high aspect ratio contact holes
Hyun-Sil Hong , Sung-Il Cho , Mi-Na Choi , Chang-Jin Kang , Han-Ku Cho , Joo-Tae Moon

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Thursday, October 12, 2006
3:00PM - 3:15PM

 RR1.00006: Low-pressure Plasma Fluorination of Polypropylene
Yang Yang , Mark Strobel , Seth Kirk , Hyacinth Cabibil , Mark J. Kushner

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Thursday, October 12, 2006
3:15PM - 3:30PM

 RR1.00007: A modeling of inductively coupled plasma in SF$_{6}$/O$_{2}$ for deep reactive ion etching of silicon
Toshikazu Sato , Toshiaki Makabe

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Session RR2: Lighting Plasmas

Chair: James Lawler, University of Wisconsin
Holiday Inn - Salon B

Thursday, October 12, 2006
1:30PM - 1:45PM

 RR2.00001: Low-pressure positive column discharges in zinc and zinc halides
David Smith

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Thursday, October 12, 2006
1:45PM - 2:00PM

 RR2.00002: Influence of the cathode composition on the performance of high pressure short arc xenon lamps
Olga B. Minayeva , Douglas A. Doughty

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Thursday, October 12, 2006
2:00PM - 2:15PM

 RR2.00003: Infrared Continuum Radiation from Metal Halide HID Lamps
T.M. Herd , J.E. Lawler

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Thursday, October 12, 2006
2:15PM - 2:30PM

 RR2.00004: Color separation in metal halide lamps
W.W. Stoffels , T. Nimalasuriya , A.J. Flikweert , W.J.M. Brok , J.J.A.M. Mullen , G.M.W. Kroesen , M. Haverlag

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Thursday, October 12, 2006
2:30PM - 3:00PM

 RR2.00005: Efficient Low-Pressure Metal-Halide Discharge Plasma Radiation Sources
Invited Speaker: Timothy Sommerer

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Thursday, October 12, 2006
3:00PM - 3:30PM

 RR2.00006: Plasma Breakdown at Low Pressure
Invited Speaker: Mark Bowden

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