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2006 59th Annual Gaseous Electronics Conference

Tuesday–Friday, October 10–13, 2006; Columbus, Ohio

Session PR1: Plasma Applications for Nanotechnology

Chair: Toshiake Makabe, Keio University
Holiday Inn - Salon CD

Thursday, October 12, 2006 8:00AM - 8:30AM	PR1.00001: Ultimate Top-down Etching Processes Using Advanced Neutral Beam for Future Nano-scale Devices Invited Speaker: Seiji Samukawa Preview Abstract
Thursday, October 12, 2006 8:30AM - 8:45AM	PR1.00002: Deposition of vertically oriented single-walled carbon nanotubes in highly collisional atmospheric pressure plasma Kuma Ohnishi , Tomohiro Nozaki , Ken Okazaki , Joachim Heberlein , Uwe Kortshagen Preview Abstract
Thursday, October 12, 2006 8:45AM - 9:00AM	PR1.00003: Measurement of plasma density and electron energy distribution function in a filamented capacitively coupled silane-argon plasma Ameya Bapat , Uwe Kortshagen Preview Abstract
Thursday, October 12, 2006 9:00AM - 9:15AM	PR1.00004: Application of microplasma to synthesis of silicon nanoparticles Kenji Sasaki , Tomohisa Ogino , Daisuke Asahi , Tomohiro Nozaki , Ken Okazaki Preview Abstract
Thursday, October 12, 2006 9:15AM - 9:30AM	PR1.00005: Synthesis of highly monodisperse Ge crystals in a capacitively coupled flow through reactor for photovoltaic applications Ryan Gresback , Uwe Kortshagen Preview Abstract

Session PR2: Computational Methods and Modeling for Plasmas

Chair: Jong Won Shon, Jusang Engineering
Holiday Inn - Salon B

Thursday, October 12, 2006 8:00AM - 8:15AM	PR2.00001: Revisiting the anomalous skin layer Igor Kaganovich Preview Abstract
Thursday, October 12, 2006 8:15AM - 8:30AM	PR2.00002: Neutral gas depletion through high electron pressures in dense plasmas Deborah O'Connell , Timo Gans , Dragos Crintea , Uwe Czarnetzki , Nader Sadeghi Preview Abstract
Thursday, October 12, 2006 8:30AM - 8:45AM	PR2.00003: A benchmark study of the global model approximation D.D. Monahan , M.M. Turner Preview Abstract
Thursday, October 12, 2006 8:45AM - 9:00AM	PR2.00004: Simulation of Plasma Spectra Using PrismSPECT Nicolas Pereyra , Joseph MacFarlane , Pamela Woodruff , Igor Golovkin , Ping Wang Preview Abstract
Thursday, October 12, 2006 9:00AM - 9:15AM	PR2.00005: Cross-platform, multi-language libraries for ionization and surface interaction effects in plasmas Peter Stoltz , Scott Sides , Nate Sizemore , Seth Veitzer , Miguel Furman , Jean-Luc Vay Preview Abstract