Session BT1: Plasma Sources I

Chair: A.R. Ellingboe, Dublin City University, Ireland
Holiday Inn - Salon CD


Tuesday, October 10, 2006
8:00AM - 8:15AM

BT1.00001: Electron beam-generated ion-ion plasmas: Etching and diagnostics
S.G. Walton , D. Leonhardt , R.F. Fernsler

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Tuesday, October 10, 2006
8:15AM - 8:30AM

BT1.00002: Automated method for creating arbitrary substrate voltage wave forms for manipulating energy distribution of bombarding ions during plasma processing
Amy Wendt , Marlann Patterson , Hsuan-Yih Chu

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Tuesday, October 10, 2006
8:30AM - 8:45AM

BT1.00003: Scaling laws in dc micro discharges
Marija Radmilovic-Radjenovic , Zoran Petrovic , Branislav Radjenovic , Paule Maguire , Charles Mahony

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Tuesday, October 10, 2006
8:45AM - 9:00AM

BT1.00004: Hydrodynamic models for the positive column with neutral gas depletion.
Jean-Luc Raimbault , Laurent Liard , Pascal Chabert

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Tuesday, October 10, 2006
9:00AM - 9:15AM

BT1.00005: Numerical Simulation of the DC Discharge Using CFD-ACE+
Ning Zhou , Peng Zhang

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Tuesday, October 10, 2006
9:15AM - 9:30AM

BT1.00006: Simulation of moving striations in rare gas plasmas
Vladimir Kolobov , Robert Arslanbekov

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Session BT2: Plasma Boundaries: Sheaths and Boundary Layers

Chair: M.A. Lieberman, University of California, Berkeley
Holiday Inn - Salon B


Tuesday, October 10, 2006
8:00AM - 8:15AM

BT2.00001: Electron Sheaths and Non-ambipolar Diffusion in Laboratory Plasma
Scott Baalrud , Noah Hershkowitz

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Tuesday, October 10, 2006
8:15AM - 8:30AM

BT2.00002: Total Non-Ambipolar RF Electron Source -- Better than a Hollow Cathode
Noah Hershkowitz , Ben Longmier , Scott Baalrud

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Tuesday, October 10, 2006
8:30AM - 8:45AM

BT2.00003: Arc cathode spots and normal spots on glow cathodes: self-organization phenomena
Mikhail Benilov

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Tuesday, October 10, 2006
8:45AM - 9:00AM

BT2.00004: Revisiting the capacitive sheath
Igor Kaganovich

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Tuesday, October 10, 2006
9:00AM - 9:15AM

BT2.00005: Influence of a micro-scale wafer structure upon sheath profile in 2f-CCP in SF$_6$/O$_2$
Fukutaro Hamaoka , Takashi Yagisawa , Toshiaki Makabe

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Tuesday, October 10, 2006
9:15AM - 9:30AM

BT2.00006: Ion Energy Distribution Measured in Pulsed Boron Trifluoride Glow Discharge
Ludovic Godet , Svetlana Radovanov , Jay Scheuer , Christophe Cardinaud , Gilles Cartry

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