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2006 59th Annual Gaseous Electronics Conference

Tuesday–Friday, October 10–13, 2006; Columbus, Ohio

Session SRP1: Poster IIA

Show Abstracts

Holiday Inn - Salon A, 4:00pm - 5:30pm

	SRP1.00001: INDUCTIVELY COUPLED PLASMAS Preview Abstract
	SRP1.00002: Real time closed loop control of an Ar and Ar/O$_2$ plasma in an ICP R. Faulkner , F. Sober\'on , A. McCarter , D. Gahan , S. Karkari , V. Milosavljevic , C. Hayden , A. Islyaikin , V.J. Law , M.B. Hopkins , B. Keville , P. Iordanov , S. Doherty , J.V. Ringwood Preview Abstract
	SRP1.00003: Electrical and plasma parameters of side type ferromagnetic ICP Kyeong Hyo Lee , Young Kwang Lee , Sung Won Cho , Chin Wook Chung Preview Abstract
	SRP1.00004: On the E to H and H to E transition mechanisms in inductively coupled plasmas MinHyong Lee , KyeongHyo Lee , ChinWook Chung Preview Abstract
	SRP1.00005: On the multistep ionizations in argon inductively coupled plasms MinHyong Lee , SungHo Jang , ChinWook Chung Preview Abstract
	SRP1.00006: Diagnostics for an inductively coupled plasma in highly Ar-diluted oxygen Zhang Yong , Satoshi Hirao , Takeshi Ohmori , Takeshi Kitajima , Toshiaki Makabe Preview Abstract
	SRP1.00007: Dynamics of an E-H transition in ICP in Ar Satoshi Hirao , Yong Zhang , Toshiaki Makabe Preview Abstract
	SRP1.00008: Experimental Study on Radio Frequency Inductively Coupled Ar/NF$_3$ Discharges Katsuyuki Hanaki , Takashi Kimura Preview Abstract
	SRP1.00009: Probe Measurements and Optical Emission Spectroscopy in RF Inductively Coupled Ar/SF$_6$ Discharges Takashi Kimura , Michio Mabuchi Preview Abstract
	SRP1.00010: Studies of Mode Transitions in Inductively Coupled Plasma Reactors Andre Daltrini , Stanislav Moshkalev , Thomas Morgan , William Graham Preview Abstract
	SRP1.00011: Measurements of Nonlocal Electron Energy Distribution Functions in the Afterglow of an RF ICP Discharge Jon Blessington , Charles DeJoseph, Jr. , Vladimir Demidov , Mark Koepke , Jason Wynne Preview Abstract
	SRP1.00012: CAPACITIVELY COUPLED PLASMAS II Preview Abstract
	SRP1.00013: Radio-frequency phase-modulation of spatial electron density in a two-frequency confined capacitive coupled discharge S.K. Karkari , C. Gaman , A.R. Ellingboe Preview Abstract
	SRP1.00014: ABSTRACT WITHDRAWN Preview Abstract
	SRP1.00015: ABSTRACT WITHDRAWN Preview Abstract
	SRP1.00016: Investigation of the Spatial Distribution Evolution of Electron Temperature in Capacitive Coupled Single- and Dual-Frequency RF Plasmas in Ar/O$_{2}$ mixture over the RF Period. S.G. Belostotsky , O.V. Braginsky , A.S. Kovalev , D.V. Lopaev , T.V. Rakhimova , A.N. Vasilieva Preview Abstract
	SRP1.00017: Capacitive Coupled Single- and Dual-Frequency RF Plasma in Argon Olga Proshina , Oleg Braginsky , Vladimir Ivanov , Alexander Kovalev , Dmitry Lopaev , Tatyana Rakhimova , Anna Vasilieva Preview Abstract
	SRP1.00018: Experimental and Theoretical Study of Ion Energy Distribution in SF and DF CCP discharges Olga Proshina , Oleg Braginsky , Alexander Kovalev , Dmitry Lopaev , Yury Mankelevich , Mike Olevanov , Tatyana Rakhimova , Anna Vasilieva , Dmitry Voloshin Preview Abstract
	SRP1.00019: Optical emission CT of etching plasmas for an effect of the anode phase of LF-bias voltage in a 2f-CCP in Ar and CF$_{4}$/Ar Mikio Ishimaru , Takeshi Ohmori , Takeshi Kitajima , Toshiaki Makabe Preview Abstract
	SRP1.00020: Low-pressure gas breakdown in dual-frequency (27/2 MHz) RF electric fields in nitrogen Valeriy Lisovskiy , Jean-Paul Booth , Karine Landry , David Douai , Valerick Cassagne , Vladimir Yegorenkov Preview Abstract
	SRP1.00021: Optical Emission Measurements of Dual Frequency Capacitively Coupled Plasmas Eric Benck , Kristen Steffens Preview Abstract
	SRP1.00022: COLLISION PROCESSES IN DISCHARGES AND PLASMAS Preview Abstract
	SRP1.00023: Excitation of the near-uv continuum of H$_2$ by fast H atoms A.V. Phelps Preview Abstract
	SRP1.00024: Possible Mechanism of ``Additional'' Production of H$^{-}$ in a Glow Discharge S. Belostotskiy , D. Economou , D. Lopaev , T. Rakhimova Preview Abstract
	SRP1.00025: Model calculations of the ``flame'' in flowing-afterglow plasmas Rainer Johnsen , Richard Rosati , Michael Golde Preview Abstract
	SRP1.00026: Dissociation, recombination and detachment in oxygen discharges diluted with argon Jon T. Gudmundsson , Eythor G. Thorsteinsson Preview Abstract
	SRP1.00027: Pump/Probe measurement of V-V transfer in O$_{2}$ and H$_{2}$ Tai Ahn , Igor Adamovich , Walter Lempert Preview Abstract
	SRP1.00028: Alignment relaxation and disorientation of Ne*(2p$_{i}$) atoms induced by collisions with He(1s$^{2}$) Cristian Bahrim , Vaibhav Khadilkar Preview Abstract
	SRP1.00029: The sensitivity of calculated ion transport coefficients for testing ion-neutral interaction potentials Mark Hogan Preview Abstract
	SRP1.00030: Mobility of O$^{+}$ in He, Ne and Ar and Interaction Potentials of HeO$^{+}$, NeO$^{+}$ and ArO$^{+}$ Daniel Danailov , Larry Viehland , Rainer Johnsen , Timothy Wright , Edmond Lee Preview Abstract
	SRP1.00031: Temperature dependence of argon excimer emission from pulsed discharge excited argon clusters Mark Masters , Hans Suedhoff , Mike De Armond , Clint Reynolds Preview Abstract
	SRP1.00032: Effects of Electron Exchange in Fully Differential Cross Sections for Charged Particle Ionization A.L. Harris , M. Foster , J.L. Peacher , D.H. Madison , H.P. Saha , K. Bartschat Preview Abstract
	SRP1.00033: Low-Energy Electron Impact Ionization of Molecular Hydrogen J.G. Childers , Kelly Kuper , Murtadha A. Khakoo Preview Abstract
	SRP1.00034: Laser optogalvanic spectroscopy of neon and krypton in a discharge plasma Naveed Piracha , Kurt Nesbett , Sohala Moten , Phil Moeller Preview Abstract
	SRP1.00035: Importance of Relativistic effects and Exchange between Bound and Continuum Electrons on Electron Impact Ionization of Xenon. Z. Stegen , D.H. Madison , H.P. Saha , K. Bartschat , S. Bellm , J. Lower , R.P. McEachran , E. Weigold Preview Abstract
	SRP1.00036: The role of chemi-ionization in fluorescent lamp discharges Abdur Rahman , Graeme Lister , Valery Sheverev Preview Abstract