Friday, October 13, 2006
10:00AM - 10:30AM
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WF1.00001: Negative Ions in Dual-Frequency Capacitively Coupled Fluorocarbon Plasmas
Invited Speaker:
Jean-Paul Booth
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Friday, October 13, 2006
10:30AM - 10:45AM
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WF1.00002: New insights into electron heating and ionisation mechanisms in CCP discharges at low pressures
Deborah O'Connell
, Timo Gans
, Uwe Czarnetzki
, David Vender
, Rod Boswell
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Friday, October 13, 2006
10:45AM - 11:00AM
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WF1.00003: Electron heating mechanisms in dual frequency capacitive discharges
M.M. Turner
, P. Chabert
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Friday, October 13, 2006
11:00AM - 11:15AM
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WF1.00004: Electron heating and ionisation mechanisms in dual-frequency capacitively coupled radio-frequency discharges
Timo Gans
, Julian Schulze
, Deborah O'Connell
, Uwe Czarnetzki
, Bert Ellingboe
, Miles Turner
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Friday, October 13, 2006
11:15AM - 11:30AM
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WF1.00005: Nonlinear electron resonance heating in dual frequency capacitive discharges
D. Ziegler
, T. Mussenbrock
, R.P. Brinkmann
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Friday, October 13, 2006
11:30AM - 11:45AM
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WF1.00006: Global model of a Dual frequency Capacitive Discharge
Pierre Levif
, Pascal Chabert
, Miles Turner
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Friday, October 13, 2006
11:45AM - 12:00PM
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WF1.00007: Frequency dependent ion kinetics in a 300 mm dual-frequency capacitively coupled plasma reactor
G.A. Hebner
, E.V. Barnat
, P.A. Miller
, A.M. Paterson
, J.P. Holland
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