Session MW1: Diagnostics II: Optical

Show
Abstracts
Chair: Ed Barnat, Sandia National Laboratories
Holiday Inn - Salon CD


Wednesday, October 11, 2006
4:00PM - 4:15PM

MW1.00001: Gaussian expansion and annular analysis of ultracold Sr plasma
Sampad Laha , Clayton Simien , Priya Gupta , Thomas Killian

Preview Abstract
Wednesday, October 11, 2006
4:15PM - 4:30PM

MW1.00002: Electric Field Measurement by Fluorescence-Dip Spectroscopy in Krypton
Tobias Kampschulte , Dirk Luggenhoelscher , Julian Schulze , Uwe Czarnetzki , Marc Bowden

Preview Abstract
Wednesday, October 11, 2006
4:30PM - 4:45PM

MW1.00003: A Laser-based Measurement System for Atmospheric Pressure Plasmas
Mark Bowden , Ronan Faulkner , Mike Hopkins

Preview Abstract
Wednesday, October 11, 2006
4:45PM - 5:00PM

MW1.00004: Gas temperature and the degree of dissociation for different operating regimes of a nitrogen helicon plasma source
Costel Biloiu , Earl Scime , Xuan Sun , Ioana A. Biloiu , Robert Hardin , Zane Harvey

Preview Abstract
Wednesday, October 11, 2006
5:00PM - 5:15PM

MW1.00005: Estimation of N atom density in a nitrogen radical source for GaN growth by optical emission spectroscopy--comparison with appearance mass spectrometry
K. Sasaki , J. Osaka , H. Kanai , T. Ishijima , H. Toyoda , H. Sugai , N. Sadeghi

Preview Abstract
Wednesday, October 11, 2006
5:15PM - 5:30PM

MW1.00006: Characteristics of in-situ chamber cleaning for DPS+ metal etcher by using optical emission spectroscopy
Yonghwan Ryu , Woojin Cho , Yongwoo Lee , Minchul Chae , Sungun Kwon , Jaeseung Hwang

Preview Abstract