Wednesday, October 11, 2006
4:00PM - 4:15PM
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MW1.00001: Gaussian expansion and annular analysis of ultracold Sr plasma
Sampad Laha
, Clayton Simien
, Priya Gupta
, Thomas Killian
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Wednesday, October 11, 2006
4:15PM - 4:30PM
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MW1.00002: Electric Field Measurement by Fluorescence-Dip Spectroscopy in Krypton
Tobias Kampschulte
, Dirk Luggenhoelscher
, Julian Schulze
, Uwe Czarnetzki
, Marc Bowden
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Wednesday, October 11, 2006
4:30PM - 4:45PM
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MW1.00003: A Laser-based Measurement System for Atmospheric Pressure Plasmas
Mark Bowden
, Ronan Faulkner
, Mike Hopkins
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Wednesday, October 11, 2006
4:45PM - 5:00PM
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MW1.00004: Gas temperature and the degree of dissociation for different operating regimes of a nitrogen helicon plasma source
Costel Biloiu
, Earl Scime
, Xuan Sun
, Ioana A. Biloiu
, Robert Hardin
, Zane Harvey
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Wednesday, October 11, 2006
5:00PM - 5:15PM
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MW1.00005: Estimation of N atom density in a nitrogen radical source for GaN growth by optical emission spectroscopy--comparison with appearance mass spectrometry
K. Sasaki
, J. Osaka
, H. Kanai
, T. Ishijima
, H. Toyoda
, H. Sugai
, N. Sadeghi
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Wednesday, October 11, 2006
5:15PM - 5:30PM
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MW1.00006: Characteristics of in-situ chamber cleaning for DPS+ metal etcher by using optical emission spectroscopy
Yonghwan Ryu
, Woojin Cho
, Yongwoo Lee
, Minchul Chae
, Sungun Kwon
, Jaeseung Hwang
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