Friday, October 13, 2006
8:00AM - 8:30AM
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VF1.00001: Plasma-Surface Interactions on a Spinning Wall Probed by Mass Spectrometry and Auger Electron Spectroscopy
Invited Speaker:
Vincent M. Donnelly
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Friday, October 13, 2006
8:30AM - 8:45AM
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VF1.00002: Influence of Ion Flux, Ion Energy, Fluorine Availability, and Surface Temperatures on SiO$_{2}$ Etch Rates in FC Plasmas
Caleb Nelson
, Sanket Sant
, Lawrence Overzet
, Matthew Goeckner
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Friday, October 13, 2006
8:45AM - 9:00AM
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VF1.00003: In-situ measurement of an accumulation and a reduction of bottom charging on a SiO$_{2}$ contact hole with a high aspect ratio in a pulsed 2f-CCP in Ar and in CF$_{4}$/Ar
Takeshi Ohmori
, Takeshi K. Goto
, Takeshi Kitajima
, Toshiaki Makabe
, Seiji Samukawa
, Ikuo Kurachi
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Friday, October 13, 2006
9:00AM - 9:15AM
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VF1.00004: Production of hyperthermal neutrals on surfaces
Tatiana Babkina
, Timo Gans
, Uwe Czarnetzki
, D.A. Kovacs
, Detlef Diesing
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Friday, October 13, 2006
9:15AM - 9:30AM
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VF1.00005: Molecule formation in plasma at surface
D.C. Schram
, J.H. van Helden
, R.A.B. Zijlmans
, G. Yagci
, J. Ropcke
, S. Welzel
, O. Gabriel
, R. Engeln
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