Session Index

Session PR1: Plasma Applications for Nanotechnology

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Abstracts
Chair: Toshiake Makabe, Keio University
Room: Holiday Inn Salon CD


Thursday, October 12, 2006
8:00AM - 8:30AM

 PR1.00001: Ultimate Top-down Etching Processes Using Advanced Neutral Beam for Future Nano-scale Devices
Invited Speaker: Seiji Samukawa

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Thursday, October 12, 2006
8:30AM - 8:45AM

 PR1.00002: Deposition of vertically oriented single-walled carbon nanotubes in highly collisional atmospheric pressure plasma
Kuma Ohnishi , Tomohiro Nozaki , Ken Okazaki , Joachim Heberlein , Uwe Kortshagen

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Thursday, October 12, 2006
8:45AM - 9:00AM

 PR1.00003: Measurement of plasma density and electron energy distribution function in a filamented capacitively coupled silane-argon plasma
Ameya Bapat , Uwe Kortshagen

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Thursday, October 12, 2006
9:00AM - 9:15AM

 PR1.00004: Application of microplasma to synthesis of silicon nanoparticles
Kenji Sasaki , Tomohisa Ogino , Daisuke Asahi , Tomohiro Nozaki , Ken Okazaki

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Thursday, October 12, 2006
9:15AM - 9:30AM

 PR1.00005: Synthesis of highly monodisperse Ge crystals in a capacitively coupled flow through reactor for photovoltaic applications
Ryan Gresback , Uwe Kortshagen

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