Wednesday, October 11, 2006
8:00AM - 8:15AM
|
GW1.00001: Detailed Time-resolved Plasma Diagnostics in a Pulsed DC Magnetron Discharge
Ian Swindells
, Peter Kelly
, James Bradley
Preview Abstract |
Wednesday, October 11, 2006
8:15AM - 8:30AM
|
GW1.00002: Investigation of total energy flux density at a floating substrate in pulsed DC unbalanced magnetron.
Martin Cada
, Greg Clarke
, James Bradley
Preview Abstract |
Wednesday, October 11, 2006
8:30AM - 8:45AM
|
GW1.00003: RF Impedance of a Spherical Probe at High and Low Gas Pressure
R.F. Fernsler
, D.N. Walker
, D.D. Blackwell
, W.E. Amatucci
, S.J. Messer
Preview Abstract |
Wednesday, October 11, 2006
8:45AM - 9:00AM
|
GW1.00004: Extended plasma parameter extraction using in-line RF metrology for multi-frequency plasma reactors
Steven Shannon
, Daniel Hoffman
, Matthew Miller
Preview Abstract |
Wednesday, October 11, 2006
9:00AM - 9:15AM
|
GW1.00005: Response of an Isolated Dust Particulate in a DC Glow Discharge Subjected to External Excitations
J. McFerran
, J. West
, V. Subramaniam
, A. Kahraman
Preview Abstract |
Wednesday, October 11, 2006
9:15AM - 9:30AM
|
GW1.00006: Collisionless nonlinear damping of dust acoustic waves due to dust charge fluctuations
Jyotirmoy Pramanik
Preview Abstract |
