Bulletin of the American Physical Society
2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006; Columbus, Ohio
Session WF1: Capacitively Coupled Plasmas
10:00 AM–12:00 PM,
Friday, October 13, 2006
Holiday Inn
Room: Salon CD
Chair: Miles Turner, Dublin City University, Ireland
Abstract ID: BAPS.2006.GEC.WF1.1
Abstract: WF1.00001 : Negative Ions in Dual-Frequency Capacitively Coupled Fluorocarbon Plasmas*
10:00 AM–10:30 AM
Preview Abstract Abstract
Author:
Jean-Paul Booth
(Ecole Polytechnique)
*In collaboration with Garrett Curley, Dragana Maric, Cormac Corr (Currently at PRL, Canberra, Australia), and Jean Guillon, LPTP, Ecole Polytechnique, 91128 Palaiseau, France.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2006.GEC.WF1.1
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