Bulletin of the American Physical Society
2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006; Columbus, Ohio
Session GW1: Diagnostics I: Electrical
8:00 AM–9:30 AM,
Wednesday, October 11, 2006
Holiday Inn
Room: Salon CD
Chair: Mark Sobolewski, National Institute of Standards and Technology
Abstract ID: BAPS.2006.GEC.GW1.4
Abstract: GW1.00004 : Extended plasma parameter extraction using in-line RF metrology for multi-frequency plasma reactors
8:45 AM–9:00 AM
Preview Abstract Abstract
Authors:
Steven Shannon
Daniel Hoffman
Matthew Miller
(Applied Materials Etch Engineering Technology Group)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2006.GEC.GW1.4
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