Session BT1: Plasma Sources I
8:00 AM–9:30 AM, Tuesday, October 10, 2006
Holiday Inn Room: Salon CD
Chair: A.R. Ellingboe, Dublin City University, Ireland
Abstract ID: BAPS.2006.GEC.BT1.5
Abstract: BT1.00005 : Numerical Simulation of the DC Discharge Using CFD-ACE+
9:00 AM–9:15 AM
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Abstract 
Authors:
Ning Zhou
Peng Zhang
(ESI-CFD, 6767 Old Madison Pike NW, Suite 600, Huntsville, AL 35806)
A low pressure DC discharge is simulated using the CFD-ACE+. The electron kinetics is obtained from the kinetic module. The local and non-local approaches are used separately for solving the kinetic equation. The results are compared at different locations in the discharge. It is shown that although the local approximation gives a good description of the electron energy distribution function (EEDF) in the bulk plasma, it fails to give accurate information of the EEDF near the wall, which is highly non-Maxwellian. As a result, the non-local approach is more appropriate for the kinetic treatment of plasma electrons in a low pressure DC discharge. The ion number density and momentum are obtained from a fluid model. For comparison, the electron continuity equations are also included. Based on the simulation model, the species' density profile, the power balance and the influence of the electron-electron coulomb collisions on the EEDF and discharge physics are investigated. The simulation results are also compared with results from pure fluid model without kinetic description.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2006.GEC.BT1.5