### Session BT1: Plasma Sources I

8:00 AM–9:30 AM, Tuesday, October 10, 2006
Holiday Inn Room: Salon CD

Chair: A.R. Ellingboe, Dublin City University, Ireland

Abstract ID: BAPS.2006.GEC.BT1.3

### Abstract: BT1.00003 : Scaling laws in dc micro discharges

8:30 AM–8:45 AM

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#### Authors:

( Associate Research Professor)

Zoran Petrovic
(Research Professor)

In order to establish the operation regime of micro discharges we should start from the low pressure discharges and employ the standard scaling laws. Discharges should scale according to the reduced electric field $E/N$ and $p$d - product proportional to the number of collisions. Finally, the scaling should be made in accordance with the $jd^2$ - describing the space charge effects [1]. We have calculated the Paschen curves and Volt- Ampere characteristic by using a PIC code and appropriate data for argon in order to establish whether the standard micro discharges operate in Townsend regime or in Glow Regime. \newline [1] A.V.Phelps, Z.Lj.Petrovi\'{c} and B.M.Jelenkovi\'{c}, Phys. Rev. E \textbf{47} 2825 (1993)