Thursday, October 20, 2005
10:00AM - 10:15AM
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VH1.00001: Diagnostics of Oxygen Atoms in Surface Wave Plasma with Vacuum Ultraviolet Laser Absorption Spectroscopy
Keigo Takeda
, Yoshiki Kubota
, Anna Serdyuchenko
, Seigo Takashima
, Masaru Hori
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Thursday, October 20, 2005
10:15AM - 10:30AM
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VH1.00002: Detection of N$_{2}$(A$^{3}\Sigma ^{+}_{u})$ metastable in DBD discharge by OODR-LIF spectroscopy
Santolo De Benedictis
, Paolo Francesco Ambrico
, Giorgio Dilecce
, Milan Simek
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Thursday, October 20, 2005
10:30AM - 10:45AM
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VH1.00003: Development of ultracompact absolute density measurement system for atomic radicals and simultaneous measurement technique of H, N, O radicals employing the system
Seigo Takashima
, Hiroyuki Kano
, Masaru Hori
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Thursday, October 20, 2005
10:45AM - 11:00AM
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VH1.00004: Multipurpose temperature gradient probe: operation and applications
Pavlo Rutkevych
, Kostya Ostrikov
, JiDong Long
, ShuYan Xu
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Thursday, October 20, 2005
11:00AM - 11:15AM
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VH1.00005: Monitoring Ion Energy at a Wafer Surface During Plasma Etching
Mark Sobolewski
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