Thursday, October 20, 2005
8:00AM - 8:15AM
|
UH1.00001: Profile simulation of high-aspect-ratio contact etching including charging effect
Seokhyun Lim
, Yongjin Kim
, Yero Lee
, Taikyung Kim
, Gyung-Jin Min
, Chang-Jin Kang
, HanKu Cho
, Joo-Tae Moon
Preview Abstract |
Thursday, October 20, 2005
8:15AM - 8:30AM
|
UH1.00002: A self-consistent modeling of feature profile evolution under competition between etching and deposition
Takashi Shimada
, Takashi Yagisawa
, Toshiaki Makabe
Preview Abstract |
Thursday, October 20, 2005
8:30AM - 8:45AM
|
UH1.00003: Development of Nano-Contact Etch Process Using New Gas Chemistry.
Jong-Woo Sun
, Chul-Ho Shin
, Gyung-Jin Min
, Chang-Jin Kang
, HanKu Cho
, Joo-Tae Moon
Preview Abstract |
Thursday, October 20, 2005
8:45AM - 9:00AM
|
UH1.00004: Etching of high-$k$ and metal gate materials in high-density chlorine-containing plasmas
Kouichi Ono
, Keisuke Nakamura
, Kazushi Osari
, Tomohiko Kitagawa
, Kazuo Takahashi
Preview Abstract |
Thursday, October 20, 2005
9:00AM - 9:15AM
|
UH1.00005: SiO$_{2}$ and Si$_{3}$N$_{4}$ Etch Mechanisms in NF$_{3}$/C$_{2}$H$_{4}$ Plasma
Puthajat Machima
, Noah Hershkowitz
Preview Abstract |
Thursday, October 20, 2005
9:15AM - 9:30AM
|
UH1.00006: Performance Tunable High-Frequency Inductively Coupled Plasma Technology in Application to Polysilicon Etcher and High Density Plasma CVD
Jong W. Shon
, GiChung Kwon
, Hong Y. Chang
Preview Abstract |
Thursday, October 20, 2005
8:00AM - 8:15AM
|
UH2.00001: Analysis of the spatiotemporal behaviour of a He-Xe column plasma by self-consistent modelling
Detlef Loffhagen
, Florian Sigeneger
Preview Abstract |
Thursday, October 20, 2005
8:15AM - 8:30AM
|
UH2.00002: Self pulsing microdischarge in argon
Antoine Rousseau
, Xavier Aubert
Preview Abstract |
Thursday, October 20, 2005
8:30AM - 8:45AM
|
UH2.00003: Spatiotemporal development of low-pressure low-current discharges in argon
Dragana Mari\'c
, Zoran Petrovi\'c
Preview Abstract |
Thursday, October 20, 2005
8:45AM - 9:00AM
|
UH2.00004: Kinetics of electrons in BF$_3$
O. \v{S}a\v{s}i\'c
, Z. Lj. Petrovi\'c
, Z. Raspopovi\'c
, L. Godet
, S. Radovanov
Preview Abstract |
Thursday, October 20, 2005
9:00AM - 9:15AM
|
UH2.00005: Radial distribution of plasma parameters in a BF$_{3}$ discharge
Ludovic Godet
, Svetlana Radovanov
, Rajesh Dorai
, Gilles Cartry
, Christophe Cardinaud
Preview Abstract |
Thursday, October 20, 2005
9:15AM - 9:30AM
|
UH2.00006: Time resolved energy distribution of ions from a cathode sheath in a plasma doping system in BF$_{3}$
Ludovic Godet
, Svetlana Radovanov
, Ziwei Fang
, James Buff
, Gilles Cartry
, Christophe Cardinaud
Preview Abstract |