Tuesday, October 18, 2005
4:00PM - 4:15PM
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MT1.00001: Diagnostics of a Supersonic Plasma Jet Reactor with Secondary Discharge
Jami McLaren
, Lenka Zajickova
, Joachim Heberlein
Preview Abstract |
Tuesday, October 18, 2005
4:15PM - 4:30PM
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MT1.00002: High Frequency ICP Source for HDPCVD
Jeunghoon Han
, Daebong Kang
, Jinhyuk Yoo
Preview Abstract |
Tuesday, October 18, 2005
4:30PM - 4:45PM
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MT1.00003: Investigation of charge-up and ion reflection effects in SiO$_2$ etching using a three-dimensional charge-up simulation
Sung Jin Kim
, Hae June Lee
, Jae Koo Lee
Preview Abstract |
Tuesday, October 18, 2005
4:45PM - 5:00PM
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MT1.00004: Effect of Species Density and Ion Scattering During Ashing on Ultra Low-$\kappa $ Inter-Level Dielectric Films
M.A. Worsley
, S. Bent
, N.C.M. Fuller
, T.L. Tai
, J. Doyle
, M. Rothwell
, T.J. Dalton
Preview Abstract |
Tuesday, October 18, 2005
5:00PM - 5:15PM
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MT1.00005: Etching with Electron Beam-Generated Ion-Ion Plasmas
S.G. Walton
, D. Leonhardt
, M. Lampe
, R.F. Fernsler
Preview Abstract |
Tuesday, October 18, 2005
4:00PM - 4:15PM
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MT2.00001: Thomson scattering and simulation study of electron energy distribution near the dielectric plate of a planar surface wave plasma source
A. Kono
, T. Otsuki
, R. Lee
, J. Kobayashi
, M. Aramaki
Preview Abstract |
Tuesday, October 18, 2005
4:15PM - 4:30PM
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MT2.00002: Time-Resolved Studies of Pulsed Plasmas
Jose Lopez
, WeiDong Zhu
, Biswa N. Ganguly
, Peter Bletzinger
, James M. Williamson
, Abraham Belkind
, Kurt H. Becker
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Tuesday, October 18, 2005
4:30PM - 4:45PM
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MT2.00003: Shockwave interactions with ionization waves in argon glow discharges
Nicholas Siefert
, Biswa Ganguly
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Tuesday, October 18, 2005
4:45PM - 5:00PM
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MT2.00004: Spectrometric analysis and kinetic modelling of an O$_2$-N$_2$ discharge
Chanel Hayden
, Derek Monahan
, Miles M. Turner
, Andrey Islyaikin
, Albert R. Ellingboe
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Tuesday, October 18, 2005
5:00PM - 5:15PM
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MT2.00005: Balmer series emission in the afterglow of high-pressure, laser-induced hydrogen and hydrogen-argon plasmas
Lutz H\"{u}wel
, Tom Morgan
, Bill Graham
Preview Abstract |
Tuesday, October 18, 2005
5:15PM - 5:30PM
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MT2.00006: Enhanced Plasma Transport due to Neutral Depletion
Amnon Fruchtman
, Gennady Makrinich
, Pascal Chabert
, Jean-Marcel Rax
Preview Abstract |