APS - 2005 58th Gaseous Electronics Conference

Session FM: Poster Session I

Chair: I. Langmuir
Doubletree Hotel - Fir/Oak

	FM.00001: MATERIAL PROCESSING Preview Abstract
	FM.00002: Low Pressure PECVD of SiO$_{x}$N$_{y}$ Thin Films with Electron-Beam Generated Plasmas Darrin Leonhardt , Scott Walton Preview Abstract
	FM.00003: Niobium surface modification in a microwave discharge Marija Raskovic , Svetozar Popovic , Leposava Vuskovic Preview Abstract
	FM.00004: Anisotropic fluorocarbon plasma etching of Si/SiGe heterostructures Ruhang Ding , Amy Wendt , Levente Klein , Mark Eriksson Preview Abstract
	FM.00005: Industrial Carbon-Doped SiO$_2$ (CDO) Film Etching in Ar/O$_2$/c-C$_4$F$_8$ High Density Plasmas A. Islyaikin , V. Krastev , I. Reid , G. Hughes , A.R. Ellingboe Preview Abstract
	FM.00006: Three-dimensional etching profile simulation using level set methods Gon Jun Kim , Sung Jin Kim , Branislav Radjenovic , Jae Koo Lee Preview Abstract
	FM.00007: Ti Surface Oxidization by Microwave Discharge Oxygen Plasma and Plasma Parameters Satoru Kakizaka , Takeshi Sakamoto , Haruaki Matsuura , Hiroshi Akatsuka Preview Abstract
	FM.00008: Plasma CVD of a-C:F Films Using C$_8$F$_{18}$ and Characterization of their Properties Yosuke Sakai , Shota Tazawa , Yoshiyuki Suda , Hirotake Sugawara Preview Abstract
	FM.00009: Noninvasive Measurement of Ion Energy Distributions in a Plasma Etching System SeJin Oh , ChinWook Chung , SungHo Cha , GiChung Kwon Preview Abstract
	FM.00010: Laser Ablation Plasma Deposition and Ion Implantation of Hafnium and Hafnium-Oxide Thin Films* Nicholas M. Jordan , Ron Gilgenbach , Michael Jones , Lumin Wang , Sha Zhu , Michael Atzmon , Dongchan Jang , Y.Y. Lau Preview Abstract
	FM.00011: MAGNETICALLY ENHANCED PLASMAS Preview Abstract
	FM.00012: Resolving the Plasma Sheath Layer in Two--Dimensional Magnetized Discharges Mark Carter , Philip Ryan , Daniel Hoffman Preview Abstract
	FM.00013: Biased substrate effects on ion characteristics in magnetized inductively coupled plasma Sanghyun Jun , Hong Young Chang Preview Abstract
	FM.00014: Time-Resolved Optical Emission Studies of Pulsed DC Magnetron Plasmas Jose Lopez , WeiDong Zhu , Abraham Belkind , Kurt H. Becker Preview Abstract
	FM.00015: INDUCTIVELY COUPLED PLASMAS Preview Abstract
	FM.00016: Model and Measurements for Closed Loop Control of an Inductively Coupled Plasma Source Bernard Keville , Petar Iordanov , Declan Doherty , Michael B. Hopkins , Ronan Faulkner Preview Abstract
	FM.00017: Investigation of inductively coupled CF$_4$/O$_2$ discharges by Langmuir probe method and optical emission spectroscopy Takashi Kimura , Masahisa Noto Preview Abstract
	FM.00018: Improvement in Uniformity of Linear Inductively Coupled Plasma for Large Area Processing S.M. Choi , S.H. Lee , J.K. Lee , K.N. Kim , G.Y. Yeom Preview Abstract
	FM.00019: Chlorine atom measurements in Ar:Cl$_{2}$ discharges. F.G. Marro , W.G. Graham Preview Abstract
	FM.00020: Study of non-local electron kinetics in a low-pressure afterglow argon plasma Sergey Gorchakov , Florian Sigeneger , Dirk Uhrlandt Preview Abstract
	FM.00021: Optical emission and self mode transition of low frequency inductively coupled plasmas driven by crossed internal oscillating currents YuPing Ren , Pavlo Rutkevych , JiDong Long , QiJin Cheng , ShuYan Xu , Kostya Ostrikov Preview Abstract
	FM.00022: Neutral gas collisional heating and the 0D/1D modeling in a semiconductor plasma reactor Masashi Shimada , George R. Tynan Preview Abstract
	FM.00023: PLASMA BOUNDARIES Preview Abstract
	FM.00024: Consistent matching of plasma and sheath Karl-Ulrich Riemann Preview Abstract
	FM.00025: A bounded active magnetized plasma over a wide range of collisionality Raoul Franklin Preview Abstract
	FM.00026: Investigation of a Planar Langmuir Probe Orientated Parallel to the direct of Flow in a Laser Ablation Plasma Peter Sheerin , Miles M. Turner , Brendan Doggett , James G. Lunney Preview Abstract
	FM.00027: Energy Distributions of Ion Drift to the Cathode in a DC Microdischarge Tsuyohito Ito , Mark Cappelli Preview Abstract
	FM.00028: Different modes of arc attachment at HID cathodes: Simulation and comparison to measurements Oliver Langenscheidt , Lars Dabringhausen , Stefan Lichtenberg , Juergen Mentel , Peter Awakowicz Preview Abstract
	FM.00029: Studies of sheath physics in two ion species plasmas with diode laser LIF Greg Severn , Noah Hershkowitz , M.M. Turner Preview Abstract
	FM.00030: Effect of bombarding ion energy distribution on ion/surface interaction during fluorocarbon plasma etching Amy Wendt , Shuntel Williams , Yuk-Hong Ting , Satoshi Hamaguchi Preview Abstract
	FM.00031: Photoresist covered wafer charging effects in pulsed plasma assisted ion implantation Ji Hyun Hur , Gyung Soo Keum , Jae Hyung Won , Jae Joon Oh , Jai Kwang Shin Preview Abstract
	FM.00032: GLOWS I Preview Abstract
	FM.00033: A multi-beam model for low-current, very high E/N discharges in hydrogen. A.V. Phelps Preview Abstract
	FM.00034: NO kinetics in pulsed DC low-pressure discharge: influence of TiO$_{2}$ surface Lina Gatilova , Olivier Guaitella , Antoine Rousseau , Yury Ionikh , Stefan Welzel , Jurgen Roepcke Preview Abstract
	FM.00035: Benchmark simulations of electronegative discharges Derek Monahan , Miles M. Turner Preview Abstract
	FM.00036: Critical Evaluation of the Global Model Approximation Derek Monahan , Miles M. Turner Preview Abstract
	FM.00037: Characterization of pulsed discharges for next-generation plasma processes Sang-Hun Seo , Shin-Jae You , Dong-Seok Lee , Sang-Won Lee , Hong-Young Chang Preview Abstract
	FM.00038: Observations of Ionization Waves in Argon Glow Discharges using a Microwave Hairpin Resonator Nicholas Siefert , Biswa Ganguly Preview Abstract
	FM.00039: ELECTRON AND POSITRON COLLISIONS WITH ATOMS AND MOLECULES Preview Abstract
	FM.00040: Benchmark calculations for electron collisions with FeII Oleg Zatsarinny , Klaus Bartschat Preview Abstract
	FM.00041: Ground and Excited State Cross Sections for Electron Impact on Cesium William McConkey , Michal Lukomski , TImothy Reddish , Sean Sutton , Wladek Kedzierski Preview Abstract
	FM.00042: Optical potential calculation of elastic electron scattering from heavy noble gases Allan Stauffer , Robert McEachran Preview Abstract
	FM.00043: A New, High-Resolution Positron Beamline James Sullivan , Violaine Vizcaino , Jens Huft , Gerard Atkinson , Adric Jones , Stephen Buckman Preview Abstract
	FM.00044: Elastic and Vibrational Cross Sections in Methane and Cyclopropane Michael Allan Preview Abstract
	FM.00045: Measurement of the Elastic and Vibrational Cross Sections in N$_2$ Over a Wide Angular Range Michael Allan Preview Abstract
	FM.00046: Rydberg-Like Feshbach Resonances in Dissociative Electron Attachment to Amines and Alcohols Michael Allan , Bogdan Ibanescu , Svetlana Zivanov , Olivier May , Patric Oulevey Preview Abstract
	FM.00047: A method for measuring optical cross sections for electron impact excitation from metastable states C.A. DeJoseph, Jr. , V.I. Demidov Preview Abstract
	FM.00048: A global (volume averaged) model of a nitrogen discharge Jon T. Gudmundsson , Narfi T. Snorrason , Sungjin Kim , Michael A. Lieberman Preview Abstract
	FM.00049: Electron excitation coefficients in oxygen \v{Z}eljka Nikitovi\'c , Vladimir \v{S}amara , Gordana Malovi\'c , Zoran Petrovi\'c Preview Abstract
	FM.00050: HIGH PRESSURE PLASMA PHYSICS AND CHEMISTRY Preview Abstract
	FM.00051: Experimental study on atmospheric pressure RF capacitive He/O$_2$ discharges Takashi Kimura , Yosuke Hattori , Takamasa Hanai Preview Abstract
	FM.00052: Gas Temperature and Metastable Density Measurements in Ar/H$_{2 }$DBD Using Diode-Laser Absorption Spectroscopy Robert Leiweke , Biswa Ganguly Preview Abstract
	FM.00053: Two-dimensional numerical study of atmospheric pressure glows in helium Peng Zhang , Uwe Kortshagen Preview Abstract
	FM.00054: On the mechanism of hollow-needle to plate atmospheric-pressure DC discharge Milan Simek , Stanislav Pekarek Preview Abstract
	FM.00055: Experimental and computational study of gas temperature characteristics for atmospheric-pressure microgap discharge Akihiro Kono , Tomoyuki Shibata , Mitsutoshi Aramaki Preview Abstract
	FM.00056: Time-Resolved Studies of Fast-Pulsed Dielectric Barrier Discharges Jose Lopez , Robert J. Leiweke , Peter Bletzinger , James M. Williamson , Abraham Belkind , Kurt H. Becker , Biswa N. Ganguly Preview Abstract
	FM.00057: Electrical properties of TiO$_{2}$ in a dielectric barrier discharge Olivier Guaitella , Antoine Rousseau Preview Abstract
	FM.00058: Microdischarge-assisted ignition of large volume dielectric barrier atmospheric pressure glow (DB-APG) discharge Jichul Shin , Laxminarayan Raja Preview Abstract
	FM.00059: Secondary ionization coefficient and electron reflection coefficient of MgO electrode Susumu Suzuki , Haruo Itoh Preview Abstract
	FM.00060: Observation of N$_{4}^{+}$ recombination at near atmospheric pressure S.F. Adams , C.A. DeJoseph, Jr. , J.M. Williamson Preview Abstract
	FM.00061: Control of ionic species composition in complex plasmas dominated by charge exchange collisions Kostya Ostrikov Preview Abstract
	FM.00062: Kinetic Modeling of Electric Discharge in a Preformed Air-Plasma Channel Tzvetelina Petrova , Harold Ladouceur , Andrew Baronavski Preview Abstract
	FM.00063: LIGHTNING PLASMAS Preview Abstract
	FM.00064: Basic Study of Discharge Simulation with Relaxation Process of Electron Swarm for Plasma Display Panel Yukio Murakami , Keiichi Kondo Preview Abstract
	FM.00065: Near IR Continuum Radiation From Metal Halide HID Lamps J.E. Lawler , M.T. Herd Preview Abstract
	FM.00066: Development of a compact arc discharge light source for measurement of radicals Haruhiko Ito , Seigo Takashima , Hiroyuki Kano , Masaru Hori Preview Abstract
	FM.00067: COMPUTATIONAL METHODS FOR PLASMAS Preview Abstract
	FM.00068: Convergence of particle-in-cell simulations Miles M. Turner Preview Abstract
	FM.00069: Spectroscopic characterization of an ultrashort laser driven Ar cluster target incorporating both Boltzmann and particle-in-cell models Manolo Sherrill , J. Abdallah , G. Csanak , E. Dodd , Y. Fukuda , Y. Faenov Preview Abstract
	FM.00070: PLASMA AND NANOSTRUCTURAL MATERIALS Preview Abstract
	FM.00071: Nanofabrication of single-crystalline flat panel display microemitter arrays: a ``plasma-building unit'' approach Ken Ostrikov , Shuyan Xu Preview Abstract
	FM.00072: Simulation of ion deposition in nanofabrication of single-crystalline carbon nanotip electron field emitters Igor Levchenko , Ken Ostrikov Preview Abstract

APS Meetings

2005 58th Gaseous Electronics Conference

Session FM: Poster Session I