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2005 58th Gaseous Electronics Conference

Sunday–Thursday, October 16–20, 2005; San Jose, California

Session EM1: Electronegative Plasmas

Chair: Miles Turner, Dublin City University
Doubletree Hotel - Pine

Monday, October 17, 2005 4:00PM - 4:15PM	EM1.00001: Charged species' densities and fluxes in a dual-frequency capacitive plasma Garrett Curley , Jean-Paul Booth , Cormac Corr , Jean Guillon , Sebastien Dine Preview Abstract
Monday, October 17, 2005 4:15PM - 4:30PM	EM1.00002: Ion Transport in Ion-Ion Plasmas M. Lampe , R.F. Fernsler , S.P. Slinker , S.G. Walton , D. Leonhardt , G. Joyce Preview Abstract
Monday, October 17, 2005 4:30PM - 4:45PM	EM1.00003: Electron and Ion Processes in Weak Plasmas Thomas M. Miller , Jane M. Van Doren , A.A. Viggiano Preview Abstract
Monday, October 17, 2005 4:45PM - 5:00PM	EM1.00004: Shading effect of electrons and positive ions in charging free plasma etching; In-situ measurement of temporal change of a contact hole charging in a pulsed two frequency CCP. Takeshi Ohmori , Takumi Akaike , Takeshi K. Goto , Takeshi Kitajima , Toshiaki Makabe Preview Abstract
Monday, October 17, 2005 5:00PM - 5:30PM	EM1.00005: Double Layers in the expanding region of electronegative plasmas Invited Speaker: Pascal Chabert Preview Abstract

Session EM2: Plasma Diagnostics I

Chair: U. Czarnetzki, Ruhr University - Bochum
Doubletree Hotel - Cedar

Monday, October 17, 2005 4:00PM - 4:30PM	EM2.00001: RF Langmuir probes, revisited Invited Speaker: Francis F. Chen Preview Abstract
Monday, October 17, 2005 4:30PM - 4:45PM	EM2.00002: Absolute electron density measurement using the cut-off method in magnetized plasmas Ikjin Choe , Chinwook Chung Preview Abstract
Monday, October 17, 2005 4:45PM - 5:00PM	EM2.00003: Electron density measurements in inductively coupled plasmas using phase resolved optical emission spectroscopy Timo Gans , Deborah O'Connell , Victor Kadetov , Uwe Czarnetzki Preview Abstract
Monday, October 17, 2005 5:00PM - 5:15PM	EM2.00004: Plasma density determination from surface-wave transmission spectra Sebastien Dine , Jean-Paul Booth , Garrett Curley , Cormac Corr , Jacques Jolly , Jean Guillon Preview Abstract
Monday, October 17, 2005 5:15PM - 5:30PM	EM2.00005: On the floating type Langmuir probe using the harmonic technique in inductively coupled plasmas SungHo Jang , Minhyong Lee , ChinWook Chung Preview Abstract