Monday, October 17, 2005
1:30PM - 2:00PM
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DM2.00001: Plasma-surface interaction: in situ and real time studies during plasma processing of materials
Invited Speaker:
Richard van de Sanden
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Monday, October 17, 2005
2:00PM - 2:15PM
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DM2.00002: FTIR characterization of the gas phase chemistry in pulsed 1,3-butadiene discharges in a Gaseous Electronics Conference (GEC) Cell
Ashish Jindal
, Lawrence Overzet
, Matthew Goeckner
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Monday, October 17, 2005
2:15PM - 2:30PM
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DM2.00003: Influence of chamber scaling on different level polymerizing processing gases
Sanket Sant
, Eric Joseph
, Baosuo Zhou
, Lawrence Overzet
, Matthew Goeckner
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Monday, October 17, 2005
2:30PM - 2:45PM
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DM2.00004: O-atom Recombination on Anodized Aluminum in an Oxygen Plasma, Studied by a New ``Spinning Wall'' Technique.
Vincent M. Donnelly
, Peter Kurunczi
, Joydeep Guha
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Monday, October 17, 2005
2:45PM - 3:00PM
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DM2.00005: Hyper-Thermal Hydrogen Atoms Produced by Surface Neutralisation
Tatiana Babkina
, Timo Gans
, Uwe Czarnetzki
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Monday, October 17, 2005
3:00PM - 3:15PM
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DM2.00006: Oxygen Plasma Ion Implantation in MgF2 Anti-Reflection Coatings
M. Tuszewski
, K. Scarborough
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