Wednesday, October 19, 2005
1:30PM - 1:45PM
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RW1.00001: Breakdown in dual frequency capacitive discharges
Miles M. Turner
Preview Abstract |
Wednesday, October 19, 2005
1:45PM - 2:00PM
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RW1.00002: Phase resolved optical emission spectroscopy on a dual frequency capacitively coupled rf discharge
Timo Gans
, Julian Schulze
, Uwe Czarnetzki
, Miles M. Turner
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Wednesday, October 19, 2005
2:00PM - 2:15PM
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RW1.00003: Frequency dependent spatial distributions of the electrons in a 300 mm diameter VHF capacitively coupled plasmas
Greg Hebner
, E. Barnat
, P. Miller
, A. Paterson
, J. Holland
, T. Lill
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Wednesday, October 19, 2005
2:15PM - 2:30PM
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RW1.00004: $E$ to $H$ transition in very high frequency capacitive discharges.
Pierre Levif
, Pascal Chabert
, Jean-Luc Raimbault
, Jean-Marcel Rax
, Michael A. Lieberman
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Wednesday, October 19, 2005
2:30PM - 3:00PM
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RW1.00005: PIC and fluid simulations of capacitively coupled plasmas for dielectric etchers and microplasmas
Invited Speaker:
Jae Koo Lee
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Wednesday, October 19, 2005
3:00PM - 3:30PM
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RW1.00006: Analysis of Triple-Frequency Capacitive Systems for Plasma Processing
Invited Speaker:
Dan Hoffman
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