Tuesday, October 18, 2005
4:00PM - 4:15PM
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MT1.00001: Diagnostics of a Supersonic Plasma Jet Reactor with Secondary Discharge
Jami McLaren
, Lenka Zajickova
, Joachim Heberlein
Preview Abstract |
Tuesday, October 18, 2005
4:15PM - 4:30PM
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MT1.00002: High Frequency ICP Source for HDPCVD
Jeunghoon Han
, Daebong Kang
, Jinhyuk Yoo
Preview Abstract |
Tuesday, October 18, 2005
4:30PM - 4:45PM
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MT1.00003: Investigation of charge-up and ion reflection effects in SiO$_2$ etching using a three-dimensional charge-up simulation
Sung Jin Kim
, Hae June Lee
, Jae Koo Lee
Preview Abstract |
Tuesday, October 18, 2005
4:45PM - 5:00PM
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MT1.00004: Effect of Species Density and Ion Scattering During Ashing on Ultra Low-$\kappa $ Inter-Level Dielectric Films
M.A. Worsley
, S. Bent
, N.C.M. Fuller
, T.L. Tai
, J. Doyle
, M. Rothwell
, T.J. Dalton
Preview Abstract |
Tuesday, October 18, 2005
5:00PM - 5:15PM
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MT1.00005: Etching with Electron Beam-Generated Ion-Ion Plasmas
S.G. Walton
, D. Leonhardt
, M. Lampe
, R.F. Fernsler
Preview Abstract |