Monday, October 17, 2005
8:00AM - 8:15AM
|
BM2.00001: Experimental and Theoretical Investigation of Dual Frequency Magnetically Enhanced Reactive Ion Etch Plasmas
Alex Paterson
, Theodoros Panagopoulos
, Valentin Todorow
, Sharma Pamarthy
, Declan Scanlan
, Thorsten Lill
, John Holland
Preview Abstract |
Monday, October 17, 2005
8:15AM - 8:30AM
|
BM2.00002: A self-consistent modeling of an RF magnetron plasma with metallic and dielectric target for sputtering
Takashi Yagisawa
, Shunji Kuroiwa
, Toshiaki Makabe
Preview Abstract |
Monday, October 17, 2005
8:30AM - 8:45AM
|
BM2.00003: LIF Measurement of Time-Dependent Spatial Density Distribution of Cu Atoms Ejected from a YBaCuO Target in Magnetron~Sputtering Plasmas
Junsi Gao
, Nayan Nafarizal
, Koichi Sasaki
, Hirotaka Toyoda
, Masumi Inoue
, Akira Fujimaki
, Satoshi Iwata
, Hideo Sugai
Preview Abstract |
Monday, October 17, 2005
8:45AM - 9:00AM
|
BM2.00004: Time-Resolved Imaging of a Pulsed DC Magnetron Plasma During the Sputter Deposition of TiO$_{2}$ Films
Abe Belkind
, Kurt Becker
, Jose Lopez
, Shanmugamurthy Shanmugamurthy
Preview Abstract |
Monday, October 17, 2005
9:00AM - 9:30AM
|
BM2.00005: Magnetically Enhanced Multiple Frequency Capacitively Coupled Plasmas: Dynamics and Strategies
Invited Speaker:
Mark J. Kushner
Preview Abstract |