Bulletin of the American Physical Society
2005 58th Gaseous Electronics Conference
Sunday–Thursday, October 16–20, 2005; San Jose, California
Session MT1: Material Processing
4:00 PM–5:15 PM,
Tuesday, October 18, 2005
Doubletree Hotel
Room: Pine
Chair: Helen Hwang, NASA, Ames, CA
Abstract ID: BAPS.2005.GEC.MT1.3
Abstract: MT1.00003 : Investigation of charge-up and ion reflection effects in SiO$_2$ etching using a three-dimensional charge-up simulation
4:30 PM–4:45 PM
Preview Abstract Abstract
Authors:
Sung Jin Kim
(Pohang University of Science and Technology)
Hae June Lee
(Pusan National University)
Jae Koo Lee
(Pohang University of Science and Technology)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2005.GEC.MT1.3
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