Bulletin of the American Physical Society
2011 Annual Meeting of the Four Corners Section of the APS
Volume 56, Number 11
Friday–Saturday, October 21–22, 2011; Tuscon, Arizona
Session D6: Applied Physics I
2:00 PM–3:00 PM,
Friday, October 21, 2011
UA Student Union
Room: Santa Cruz
Chair: Vincent Lonij, University of Arizona
Abstract ID: BAPS.2011.4CF.D6.5
Abstract: D6.00005 : Extreme Ultraviolet lithography by de-magnified generalized Talbot imaging
2:48 PM–3:00 PM
Preview Abstract Abstract
Authors:
Lukasz Urbanski
(Colorado State University)
Artak Isoyan
(University of Wisconsin, Madison)
Aaron Stein
(Center for Functional Nanomaterials, Brookhaven National Laboratory)
Carmen Menoni
(Colorado State University, NSF ERC for EUV science and technology)
Jorge Rocca
(Colorado State University, NSF ERC for EUV science and technology)
Mario Marconi
(Colorado State University, NSF ERC for EUV science and technology)
Collaborations:
Colorado State University, NSF ERC for EUV science and technology, University of Wisconsin, Madison, Center for Functional Nanomaterials, Brookhaven National Laboratory
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2011.4CF.D6.5
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